7/3/2012	6:13:14 AM	Executing task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
7/3/2012	6:13:15 AM	Recipe started at 6:13 AM
7/3/2012	6:13:15 AM	Helium valve closed
7/3/2012	6:13:15 AM	H2 valve closed
7/3/2012	6:13:15 AM	BCl3 valve closed
7/3/2012	6:13:15 AM	PH3 valve closed
7/3/2012	6:13:15 AM	SiCl4 pre valve closed
7/3/2012	6:13:15 AM	SiCl4 post valve closed
7/3/2012	6:13:15 AM	Main Vac valve closed
7/3/2012	6:13:15 AM	Bypass valve closed
7/3/2012	6:13:15 AM	Bubbler valve closed
7/3/2012	6:13:15 AM	Helium MFC set to  0.000000
7/3/2012	6:13:15 AM	H2 MFC set to  0.000000
7/3/2012	6:13:15 AM	BCl3 MFC set to  0.000000
7/3/2012	6:13:15 AM	PH3 MFC set to  0.000000
7/3/2012	6:13:15 AM	SiCl4 MFC set to  0.000000
7/3/2012	6:13:15 AM	Bypass solenoid MFC set to  0.000000
7/3/2012	6:13:15 AM	Tube furnace set to 0
7/3/2012	6:13:18 AM	H2 valve closed
7/3/2012	6:13:18 AM	BCl3 valve closed
7/3/2012	6:13:18 AM	PH3 valve closed
7/3/2012	6:13:18 AM	SiCl4 pre valve closed
7/3/2012	6:13:18 AM	SiCl4 post valve closed
7/3/2012	6:13:18 AM	Main Vac valve closed
7/3/2012	6:13:18 AM	Bypass valve closed
7/3/2012	6:13:18 AM	Bubbler valve closed
7/3/2012	6:13:18 AM	Helium valve opened
7/3/2012	6:13:18 AM	Helium MFC set to  500.000000
7/3/2012	6:13:18 AM	H2 MFC set to  0.000000
7/3/2012	6:13:18 AM	BCl3 MFC set to  0.000000
7/3/2012	6:13:18 AM	PH3 MFC set to  0.000000
7/3/2012	6:13:18 AM	SiCl4 MFC set to  0.000000
7/3/2012	6:13:18 AM	Bypass solenoid MFC set to  0.000000
7/3/2012	6:13:18 AM	Tube furnace set to 0
7/3/2012	6:14:31 AM	Helium valve closed
7/3/2012	6:14:31 AM	H2 valve closed
7/3/2012	6:14:31 AM	BCl3 valve closed
7/3/2012	6:14:31 AM	PH3 valve closed
7/3/2012	6:14:31 AM	SiCl4 pre valve closed
7/3/2012	6:14:31 AM	SiCl4 post valve closed
7/3/2012	6:14:31 AM	Main Vac valve closed
7/3/2012	6:14:31 AM	Bypass valve closed
7/3/2012	6:14:31 AM	Bubbler valve closed
7/3/2012	6:14:31 AM	Helium MFC set to  0.000000
7/3/2012	6:14:31 AM	H2 MFC set to  0.000000
7/3/2012	6:14:31 AM	BCl3 MFC set to  0.000000
7/3/2012	6:14:31 AM	PH3 MFC set to  0.000000
7/3/2012	6:14:31 AM	SiCl4 MFC set to  0.000000
7/3/2012	6:14:31 AM	Bypass solenoid MFC set to  0.000000
7/3/2012	6:14:31 AM	Tube furnace set to 0
7/3/2012	6:14:32 AM	Run finished at 6:14 AM
7/3/2012	6:14:32 AM	Completed task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
7/3/2012	6:19:44 AM	Executing task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
7/3/2012	6:19:45 AM	Recipe started at 6:19 AM
7/3/2012	6:19:45 AM	Helium valve closed
7/3/2012	6:19:45 AM	H2 valve closed
7/3/2012	6:19:45 AM	BCl3 valve closed
7/3/2012	6:19:45 AM	PH3 valve closed
7/3/2012	6:19:45 AM	SiCl4 pre valve closed
7/3/2012	6:19:45 AM	SiCl4 post valve closed
7/3/2012	6:19:45 AM	Main Vac valve closed
7/3/2012	6:19:45 AM	Bubbler valve closed
7/3/2012	6:19:45 AM	Bypass valve opened
7/3/2012	6:19:45 AM	Helium MFC set to  0.000000
7/3/2012	6:19:45 AM	H2 MFC set to  0.000000
7/3/2012	6:19:45 AM	BCl3 MFC set to  0.000000
7/3/2012	6:19:45 AM	PH3 MFC set to  0.000000
7/3/2012	6:19:45 AM	SiCl4 MFC set to  0.000000
7/3/2012	6:19:45 AM	Bypass solenoid MFC set to  0.000000
7/3/2012	6:19:45 AM	Tube furnace set to 0
7/3/2012	6:20:54 AM	Helium valve closed
7/3/2012	6:20:54 AM	H2 valve closed
7/3/2012	6:20:54 AM	BCl3 valve closed
7/3/2012	6:20:54 AM	PH3 valve closed
7/3/2012	6:20:54 AM	SiCl4 pre valve closed
7/3/2012	6:20:54 AM	SiCl4 post valve closed
7/3/2012	6:20:54 AM	Main Vac valve closed
7/3/2012	6:20:54 AM	Bubbler valve closed
7/3/2012	6:20:54 AM	Bypass valve opened
7/3/2012	6:20:54 AM	Helium MFC set to  0.000000
7/3/2012	6:20:54 AM	H2 MFC set to  0.000000
7/3/2012	6:20:54 AM	BCl3 MFC set to  0.000000
7/3/2012	6:20:54 AM	PH3 MFC set to  0.000000
7/3/2012	6:20:54 AM	SiCl4 MFC set to  0.000000
7/3/2012	6:20:54 AM	Bypass solenoid MFC set to  0.000000
7/3/2012	6:20:54 AM	Tube furnace set to 0
7/3/2012	6:21:54 AM	Helium valve closed
7/3/2012	6:21:54 AM	H2 valve closed
7/3/2012	6:21:54 AM	BCl3 valve closed
7/3/2012	6:21:54 AM	PH3 valve closed
7/3/2012	6:21:54 AM	SiCl4 pre valve closed
7/3/2012	6:21:54 AM	SiCl4 post valve closed
7/3/2012	6:21:54 AM	Bypass valve closed
7/3/2012	6:21:54 AM	Bubbler valve closed
7/3/2012	6:21:54 AM	Main Vac valve opened
7/3/2012	6:21:54 AM	Helium MFC set to  0.000000
7/3/2012	6:21:54 AM	H2 MFC set to  0.000000
7/3/2012	6:21:54 AM	BCl3 MFC set to  0.000000
7/3/2012	6:21:54 AM	PH3 MFC set to  0.000000
7/3/2012	6:21:54 AM	SiCl4 MFC set to  0.000000
7/3/2012	6:21:54 AM	Bypass solenoid MFC set to  0.000000
7/3/2012	6:21:54 AM	Tube furnace set to 0
7/3/2012	6:21:55 AM	Run finished at 6:21 AM
7/3/2012	6:21:55 AM	Completed task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
7/3/2012	6:22:48 AM	Recipe started at 6:22 AM
7/3/2012	6:22:48 AM	Helium valve closed
7/3/2012	6:22:48 AM	H2 valve closed
7/3/2012	6:22:48 AM	BCl3 valve closed
7/3/2012	6:22:48 AM	PH3 valve closed
7/3/2012	6:22:48 AM	SiCl4 pre valve closed
7/3/2012	6:22:48 AM	SiCl4 post valve closed
7/3/2012	6:22:48 AM	Bypass valve closed
7/3/2012	6:22:48 AM	Bubbler valve closed
7/3/2012	6:22:48 AM	Main Vac valve opened
7/3/2012	6:22:48 AM	Helium MFC set to  0.000000
7/3/2012	6:22:48 AM	H2 MFC set to  0.000000
7/3/2012	6:22:48 AM	BCl3 MFC set to  0.000000
7/3/2012	6:22:48 AM	PH3 MFC set to  0.000000
7/3/2012	6:22:48 AM	SiCl4 MFC set to  0.000000
7/3/2012	6:22:48 AM	Bypass solenoid MFC set to  0.000000
7/3/2012	6:22:48 AM	Tube furnace set to 0
7/3/2012	7:52:48 AM	Helium valve closed
7/3/2012	7:52:48 AM	H2 valve closed
7/3/2012	7:52:48 AM	BCl3 valve closed
7/3/2012	7:52:48 AM	PH3 valve closed
7/3/2012	7:52:48 AM	SiCl4 pre valve closed
7/3/2012	7:52:48 AM	SiCl4 post valve closed
7/3/2012	7:52:48 AM	Main Vac valve closed
7/3/2012	7:52:48 AM	Bypass valve closed
7/3/2012	7:52:48 AM	Bubbler valve closed
7/3/2012	7:52:48 AM	Helium MFC set to  0.000000
7/3/2012	7:52:48 AM	H2 MFC set to  0.000000
7/3/2012	7:52:48 AM	BCl3 MFC set to  0.000000
7/3/2012	7:52:48 AM	PH3 MFC set to  0.000000
7/3/2012	7:52:48 AM	SiCl4 MFC set to  0.000000
7/3/2012	7:52:48 AM	Bypass solenoid MFC set to  0.000000
7/3/2012	7:52:48 AM	Tube furnace set to 0
7/3/2012	7:52:51 AM	Helium valve closed
7/3/2012	7:52:51 AM	BCl3 valve closed
7/3/2012	7:52:51 AM	PH3 valve closed
7/3/2012	7:52:51 AM	SiCl4 pre valve closed
7/3/2012	7:52:51 AM	SiCl4 post valve closed
7/3/2012	7:52:51 AM	Main Vac valve closed
7/3/2012	7:52:51 AM	Bypass valve closed
7/3/2012	7:52:51 AM	Bubbler valve closed
7/3/2012	7:52:51 AM	H2 valve opened
7/3/2012	7:52:51 AM	Helium MFC set to  0.000000
7/3/2012	7:52:51 AM	H2 MFC set to  500.000000
7/3/2012	7:52:51 AM	BCl3 MFC set to  0.000000
7/3/2012	7:52:51 AM	PH3 MFC set to  0.000000
7/3/2012	7:52:51 AM	SiCl4 MFC set to  0.000000
7/3/2012	7:52:51 AM	Bypass solenoid MFC set to  0.000000
7/3/2012	7:52:51 AM	Tube furnace set to 0
7/3/2012	7:54:07 AM	Helium valve closed
7/3/2012	7:54:07 AM	BCl3 valve closed
7/3/2012	7:54:07 AM	PH3 valve closed
7/3/2012	7:54:07 AM	SiCl4 pre valve closed
7/3/2012	7:54:07 AM	SiCl4 post valve closed
7/3/2012	7:54:07 AM	Main Vac valve closed
7/3/2012	7:54:07 AM	Bypass valve closed
7/3/2012	7:54:07 AM	H2 valve opened
7/3/2012	7:54:07 AM	Bubbler valve opened
7/3/2012	7:54:07 AM	Helium MFC set to  0.000000
7/3/2012	7:54:07 AM	H2 MFC set to  500.000000
7/3/2012	7:54:07 AM	BCl3 MFC set to  0.000000
7/3/2012	7:54:07 AM	PH3 MFC set to  0.000000
7/3/2012	7:54:07 AM	SiCl4 MFC set to  0.000000
7/3/2012	7:54:07 AM	Bypass solenoid MFC set to  0.000000
7/3/2012	7:54:08 AM	Tube furnace set to 0
7/3/2012	7:54:09 AM	Helium valve closed
7/3/2012	7:54:09 AM	BCl3 valve closed
7/3/2012	7:54:09 AM	PH3 valve closed
7/3/2012	7:54:09 AM	SiCl4 pre valve closed
7/3/2012	7:54:09 AM	SiCl4 post valve closed
7/3/2012	7:54:09 AM	Main Vac valve closed
7/3/2012	7:54:09 AM	Bypass valve closed
7/3/2012	7:54:09 AM	H2 valve opened
7/3/2012	7:54:09 AM	Bubbler valve opened
7/3/2012	7:54:09 AM	Helium MFC set to  0.000000
7/3/2012	7:54:09 AM	H2 MFC set to  500.000000
7/3/2012	7:54:09 AM	BCl3 MFC set to  0.000000
7/3/2012	7:54:09 AM	PH3 MFC set to  0.000000
7/3/2012	7:54:09 AM	SiCl4 MFC set to  0.000000
7/3/2012	7:54:09 AM	Bypass solenoid MFC set to  0.000000
7/3/2012	7:54:09 AM	Tube furnace set to 1000
7/3/2012	8:19:09 AM	Helium valve closed
7/3/2012	8:19:09 AM	PH3 valve closed
7/3/2012	8:19:09 AM	Main Vac valve closed
7/3/2012	8:19:09 AM	Bypass valve closed
7/3/2012	8:19:09 AM	H2 valve opened
7/3/2012	8:19:09 AM	BCl3 valve opened
7/3/2012	8:19:09 AM	SiCl4 pre valve opened
7/3/2012	8:19:09 AM	SiCl4 post valve opened
7/3/2012	8:19:09 AM	Bubbler valve opened
7/3/2012	8:19:09 AM	Helium MFC set to  0.000000
7/3/2012	8:19:09 AM	H2 MFC set to  450.000000
7/3/2012	8:19:09 AM	BCl3 MFC set to  0.750000
7/3/2012	8:19:09 AM	PH3 MFC set to  0.000000
7/3/2012	8:19:09 AM	SiCl4 MFC set to  50.000000
7/3/2012	8:19:09 AM	Bypass solenoid MFC set to  0.000000
7/3/2012	8:19:09 AM	Tube furnace set to 1000
7/3/2012	8:47:09 AM	Helium valve closed
7/3/2012	8:47:09 AM	BCl3 valve closed
7/3/2012	8:47:09 AM	PH3 valve closed
7/3/2012	8:47:09 AM	SiCl4 pre valve closed
7/3/2012	8:47:09 AM	SiCl4 post valve closed
7/3/2012	8:47:09 AM	Main Vac valve closed
7/3/2012	8:47:09 AM	Bypass valve closed
7/3/2012	8:47:09 AM	H2 valve opened
7/3/2012	8:47:09 AM	Bubbler valve opened
7/3/2012	8:47:09 AM	Helium MFC set to  0.000000
7/3/2012	8:47:09 AM	H2 MFC set to  500.000000
7/3/2012	8:47:09 AM	BCl3 MFC set to  0.000000
7/3/2012	8:47:09 AM	PH3 MFC set to  0.000000
7/3/2012	8:47:09 AM	SiCl4 MFC set to  0.000000
7/3/2012	8:47:09 AM	Bypass solenoid MFC set to  0.000000
7/3/2012	8:47:09 AM	Tube furnace set to 750
7/3/2012	9:02:09 AM	H2 valve closed
7/3/2012	9:02:09 AM	BCl3 valve closed
7/3/2012	9:02:09 AM	PH3 valve closed
7/3/2012	9:02:09 AM	SiCl4 pre valve closed
7/3/2012	9:02:09 AM	SiCl4 post valve closed
7/3/2012	9:02:09 AM	Main Vac valve closed
7/3/2012	9:02:09 AM	Bypass valve closed
7/3/2012	9:02:09 AM	Helium valve opened
7/3/2012	9:02:09 AM	Bubbler valve opened
7/3/2012	9:02:09 AM	Helium MFC set to  500.000000
7/3/2012	9:02:09 AM	H2 MFC set to  0.000000
7/3/2012	9:02:09 AM	BCl3 MFC set to  0.000000
7/3/2012	9:02:09 AM	PH3 MFC set to  0.000000
7/3/2012	9:02:09 AM	SiCl4 MFC set to  0.000000
7/3/2012	9:02:09 AM	Bypass solenoid MFC set to  0.000000
7/3/2012	9:02:09 AM	Tube furnace set to 0
7/3/2012	9:22:09 AM	Helium valve closed
7/3/2012	9:22:09 AM	H2 valve closed
7/3/2012	9:22:09 AM	BCl3 valve closed
7/3/2012	9:22:09 AM	PH3 valve closed
7/3/2012	9:22:09 AM	SiCl4 pre valve closed
7/3/2012	9:22:09 AM	SiCl4 post valve closed
7/3/2012	9:22:09 AM	Main Vac valve closed
7/3/2012	9:22:09 AM	Bypass valve closed
7/3/2012	9:22:09 AM	Bubbler valve closed
7/3/2012	9:22:09 AM	Helium MFC set to  0.000000
7/3/2012	9:22:09 AM	H2 MFC set to  0.000000
7/3/2012	9:22:09 AM	BCl3 MFC set to  0.000000
7/3/2012	9:22:09 AM	PH3 MFC set to  0.000000
7/3/2012	9:22:09 AM	SiCl4 MFC set to  0.000000
7/3/2012	9:22:09 AM	Bypass solenoid MFC set to  0.000000
7/3/2012	9:22:09 AM	Tube furnace set to 0
7/3/2012	9:25:10 AM	Helium valve closed
7/3/2012	9:25:10 AM	H2 valve closed
7/3/2012	9:25:10 AM	BCl3 valve closed
7/3/2012	9:25:10 AM	PH3 valve closed
7/3/2012	9:25:10 AM	SiCl4 pre valve closed
7/3/2012	9:25:10 AM	SiCl4 post valve closed
7/3/2012	9:25:10 AM	Main Vac valve closed
7/3/2012	9:25:10 AM	Bubbler valve closed
7/3/2012	9:25:10 AM	Bypass valve opened
7/3/2012	9:25:10 AM	Helium MFC set to  0.000000
7/3/2012	9:25:10 AM	H2 MFC set to  0.000000
7/3/2012	9:25:10 AM	BCl3 MFC set to  0.000000
7/3/2012	9:25:10 AM	PH3 MFC set to  0.000000
7/3/2012	9:25:10 AM	SiCl4 MFC set to  0.000000
7/3/2012	9:25:10 AM	Bypass solenoid MFC set to  0.000000
7/3/2012	9:25:10 AM	Tube furnace set to 0
7/3/2012	9:26:00 AM	Helium valve closed
7/3/2012	9:26:00 AM	H2 valve closed
7/3/2012	9:26:00 AM	BCl3 valve closed
7/3/2012	9:26:00 AM	PH3 valve closed
7/3/2012	9:26:00 AM	SiCl4 pre valve closed
7/3/2012	9:26:00 AM	SiCl4 post valve closed
7/3/2012	9:26:00 AM	Main Vac valve closed
7/3/2012	9:26:00 AM	Bubbler valve closed
7/3/2012	9:26:00 AM	Bypass valve opened
7/3/2012	9:26:00 AM	Helium MFC set to  0.000000
7/3/2012	9:26:00 AM	H2 MFC set to  0.000000
7/3/2012	9:26:00 AM	BCl3 MFC set to  0.000000
7/3/2012	9:26:00 AM	PH3 MFC set to  0.000000
7/3/2012	9:26:00 AM	SiCl4 MFC set to  0.000000
7/3/2012	9:26:00 AM	Bypass solenoid MFC set to  0.000000
7/3/2012	9:26:00 AM	Tube furnace set to 0
7/3/2012	9:27:00 AM	Helium valve closed
7/3/2012	9:27:00 AM	H2 valve closed
7/3/2012	9:27:00 AM	BCl3 valve closed
7/3/2012	9:27:00 AM	PH3 valve closed
7/3/2012	9:27:00 AM	SiCl4 pre valve closed
7/3/2012	9:27:00 AM	SiCl4 post valve closed
7/3/2012	9:27:00 AM	Bypass valve closed
7/3/2012	9:27:00 AM	Bubbler valve closed
7/3/2012	9:27:00 AM	Main Vac valve opened
7/3/2012	9:27:00 AM	Helium MFC set to  0.000000
7/3/2012	9:27:00 AM	H2 MFC set to  0.000000
7/3/2012	9:27:00 AM	BCl3 MFC set to  0.000000
7/3/2012	9:27:00 AM	PH3 MFC set to  0.000000
7/3/2012	9:27:00 AM	SiCl4 MFC set to  0.000000
7/3/2012	9:27:00 AM	Bypass solenoid MFC set to  0.000000
7/3/2012	9:27:00 AM	Tube furnace set to 0
7/3/2012	9:29:11 AM	Run finished at 9:29 AM
7/3/2012	9:37:25 AM	Executing task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
7/3/2012	9:37:25 AM	Recipe started at 9:37 AM
7/3/2012	9:37:25 AM	Helium valve closed
7/3/2012	9:37:25 AM	H2 valve closed
7/3/2012	9:37:25 AM	BCl3 valve closed
7/3/2012	9:37:25 AM	PH3 valve closed
7/3/2012	9:37:25 AM	SiCl4 pre valve closed
7/3/2012	9:37:25 AM	SiCl4 post valve closed
7/3/2012	9:37:25 AM	Main Vac valve closed
7/3/2012	9:37:25 AM	Bypass valve closed
7/3/2012	9:37:25 AM	Bubbler valve closed
7/3/2012	9:37:25 AM	Helium MFC set to  0.000000
7/3/2012	9:37:25 AM	H2 MFC set to  0.000000
7/3/2012	9:37:25 AM	BCl3 MFC set to  0.000000
7/3/2012	9:37:25 AM	PH3 MFC set to  0.000000
7/3/2012	9:37:25 AM	SiCl4 MFC set to  0.000000
7/3/2012	9:37:25 AM	Bypass solenoid MFC set to  0.000000
7/3/2012	9:37:26 AM	Tube furnace set to 0
7/3/2012	9:37:29 AM	H2 valve closed
7/3/2012	9:37:29 AM	BCl3 valve closed
7/3/2012	9:37:29 AM	PH3 valve closed
7/3/2012	9:37:29 AM	SiCl4 pre valve closed
7/3/2012	9:37:29 AM	SiCl4 post valve closed
7/3/2012	9:37:29 AM	Main Vac valve closed
7/3/2012	9:37:29 AM	Bypass valve closed
7/3/2012	9:37:29 AM	Bubbler valve closed
7/3/2012	9:37:29 AM	Helium valve opened
7/3/2012	9:37:29 AM	Helium MFC set to  500.000000
7/3/2012	9:37:29 AM	H2 MFC set to  0.000000
7/3/2012	9:37:29 AM	BCl3 MFC set to  0.000000
7/3/2012	9:37:29 AM	PH3 MFC set to  0.000000
7/3/2012	9:37:29 AM	SiCl4 MFC set to  0.000000
7/3/2012	9:37:29 AM	Bypass solenoid MFC set to  0.000000
7/3/2012	9:37:29 AM	Tube furnace set to 0
7/3/2012	9:38:39 AM	Helium valve closed
7/3/2012	9:38:39 AM	H2 valve closed
7/3/2012	9:38:39 AM	BCl3 valve closed
7/3/2012	9:38:39 AM	PH3 valve closed
7/3/2012	9:38:39 AM	SiCl4 pre valve closed
7/3/2012	9:38:39 AM	SiCl4 post valve closed
7/3/2012	9:38:39 AM	Main Vac valve closed
7/3/2012	9:38:39 AM	Bypass valve closed
7/3/2012	9:38:39 AM	Bubbler valve closed
7/3/2012	9:38:39 AM	Helium MFC set to  0.000000
7/3/2012	9:38:39 AM	H2 MFC set to  0.000000
7/3/2012	9:38:39 AM	BCl3 MFC set to  0.000000
7/3/2012	9:38:39 AM	PH3 MFC set to  0.000000
7/3/2012	9:38:39 AM	SiCl4 MFC set to  0.000000
7/3/2012	9:38:39 AM	Bypass solenoid MFC set to  0.000000
7/3/2012	9:38:39 AM	Tube furnace set to 0
7/3/2012	9:38:40 AM	Run finished at 9:38 AM
7/3/2012	9:38:40 AM	Completed task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
7/3/2012	9:46:34 AM	Executing task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
7/3/2012	9:46:35 AM	Recipe started at 9:46 AM
7/3/2012	9:46:35 AM	Helium valve closed
7/3/2012	9:46:35 AM	H2 valve closed
7/3/2012	9:46:35 AM	BCl3 valve closed
7/3/2012	9:46:35 AM	PH3 valve closed
7/3/2012	9:46:35 AM	SiCl4 pre valve closed
7/3/2012	9:46:35 AM	SiCl4 post valve closed
7/3/2012	9:46:35 AM	Main Vac valve closed
7/3/2012	9:46:35 AM	Bubbler valve closed
7/3/2012	9:46:35 AM	Bypass valve opened
7/3/2012	9:46:35 AM	Helium MFC set to  0.000000
7/3/2012	9:46:35 AM	H2 MFC set to  0.000000
7/3/2012	9:46:35 AM	BCl3 MFC set to  0.000000
7/3/2012	9:46:35 AM	PH3 MFC set to  0.000000
7/3/2012	9:46:35 AM	SiCl4 MFC set to  0.000000
7/3/2012	9:46:35 AM	Bypass solenoid MFC set to  0.000000
7/3/2012	9:46:35 AM	Tube furnace set to 0
7/3/2012	9:47:45 AM	Helium valve closed
7/3/2012	9:47:45 AM	H2 valve closed
7/3/2012	9:47:45 AM	BCl3 valve closed
7/3/2012	9:47:45 AM	PH3 valve closed
7/3/2012	9:47:45 AM	SiCl4 pre valve closed
7/3/2012	9:47:46 AM	SiCl4 post valve closed
7/3/2012	9:47:46 AM	Main Vac valve closed
7/3/2012	9:47:46 AM	Bubbler valve closed
7/3/2012	9:47:46 AM	Bypass valve opened
7/3/2012	9:47:46 AM	Helium MFC set to  0.000000
7/3/2012	9:47:46 AM	H2 MFC set to  0.000000
7/3/2012	9:47:46 AM	BCl3 MFC set to  0.000000
7/3/2012	9:47:46 AM	PH3 MFC set to  0.000000
7/3/2012	9:47:46 AM	SiCl4 MFC set to  0.000000
7/3/2012	9:47:46 AM	Bypass solenoid MFC set to  0.000000
7/3/2012	9:47:46 AM	Tube furnace set to 0
7/3/2012	9:48:46 AM	Helium valve closed
7/3/2012	9:48:46 AM	H2 valve closed
7/3/2012	9:48:46 AM	BCl3 valve closed
7/3/2012	9:48:46 AM	PH3 valve closed
7/3/2012	9:48:46 AM	SiCl4 pre valve closed
7/3/2012	9:48:46 AM	SiCl4 post valve closed
7/3/2012	9:48:46 AM	Bypass valve closed
7/3/2012	9:48:46 AM	Bubbler valve closed
7/3/2012	9:48:46 AM	Main Vac valve opened
7/3/2012	9:48:46 AM	Helium MFC set to  0.000000
7/3/2012	9:48:46 AM	H2 MFC set to  0.000000
7/3/2012	9:48:46 AM	BCl3 MFC set to  0.000000
7/3/2012	9:48:46 AM	PH3 MFC set to  0.000000
7/3/2012	9:48:46 AM	SiCl4 MFC set to  0.000000
7/3/2012	9:48:46 AM	Bypass solenoid MFC set to  0.000000
7/3/2012	9:48:46 AM	Tube furnace set to 0
7/3/2012	9:48:47 AM	Run finished at 9:48 AM
7/3/2012	9:48:47 AM	Completed task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
7/3/2012	10:42:36 AM	Main Vac valve closed
7/3/2012	10:42:48 AM	Main Vac valve opened
7/3/2012	10:45:53 AM	Recipe started at 10:45 AM
7/3/2012	10:45:53 AM	Helium valve closed
7/3/2012	10:45:53 AM	H2 valve closed
7/3/2012	10:45:53 AM	BCl3 valve closed
7/3/2012	10:45:53 AM	PH3 valve closed
7/3/2012	10:45:53 AM	SiCl4 pre valve closed
7/3/2012	10:45:53 AM	SiCl4 post valve closed
7/3/2012	10:45:53 AM	Bypass valve closed
7/3/2012	10:45:53 AM	Bubbler valve closed
7/3/2012	10:45:53 AM	Main Vac valve opened
7/3/2012	10:45:53 AM	Helium MFC set to  0.000000
7/3/2012	10:45:53 AM	H2 MFC set to  0.000000
7/3/2012	10:45:53 AM	BCl3 MFC set to  0.000000
7/3/2012	10:45:53 AM	PH3 MFC set to  0.000000
7/3/2012	10:45:53 AM	SiCl4 MFC set to  0.000000
7/3/2012	10:45:53 AM	Bypass solenoid MFC set to  0.000000
7/3/2012	10:45:53 AM	Tube furnace set to 0
7/3/2012	11:20:53 AM	Helium valve closed
7/3/2012	11:20:53 AM	H2 valve closed
7/3/2012	11:20:53 AM	BCl3 valve closed
7/3/2012	11:20:53 AM	PH3 valve closed
7/3/2012	11:20:53 AM	SiCl4 pre valve closed
7/3/2012	11:20:53 AM	SiCl4 post valve closed
7/3/2012	11:20:53 AM	Main Vac valve closed
7/3/2012	11:20:53 AM	Bypass valve closed
7/3/2012	11:20:53 AM	Bubbler valve closed
7/3/2012	11:20:53 AM	Helium MFC set to  0.000000
7/3/2012	11:20:53 AM	H2 MFC set to  0.000000
7/3/2012	11:20:53 AM	BCl3 MFC set to  0.000000
7/3/2012	11:20:53 AM	PH3 MFC set to  0.000000
7/3/2012	11:20:53 AM	SiCl4 MFC set to  0.000000
7/3/2012	11:20:53 AM	Bypass solenoid MFC set to  0.000000
7/3/2012	11:20:53 AM	Tube furnace set to 0
7/3/2012	11:20:56 AM	Helium valve closed
7/3/2012	11:20:56 AM	BCl3 valve closed
7/3/2012	11:20:56 AM	PH3 valve closed
7/3/2012	11:20:56 AM	SiCl4 pre valve closed
7/3/2012	11:20:56 AM	SiCl4 post valve closed
7/3/2012	11:20:56 AM	Main Vac valve closed
7/3/2012	11:20:56 AM	Bypass valve closed
7/3/2012	11:20:56 AM	Bubbler valve closed
7/3/2012	11:20:56 AM	H2 valve opened
7/3/2012	11:20:56 AM	Helium MFC set to  0.000000
7/3/2012	11:20:56 AM	H2 MFC set to  500.000000
7/3/2012	11:20:56 AM	BCl3 MFC set to  0.000000
7/3/2012	11:20:56 AM	PH3 MFC set to  0.000000
7/3/2012	11:20:56 AM	SiCl4 MFC set to  0.000000
7/3/2012	11:20:56 AM	Bypass solenoid MFC set to  0.000000
7/3/2012	11:20:56 AM	Tube furnace set to 0
7/3/2012	11:22:10 AM	Helium valve closed
7/3/2012	11:22:10 AM	BCl3 valve closed
7/3/2012	11:22:10 AM	PH3 valve closed
7/3/2012	11:22:10 AM	SiCl4 pre valve closed
7/3/2012	11:22:10 AM	SiCl4 post valve closed
7/3/2012	11:22:10 AM	Main Vac valve closed
7/3/2012	11:22:10 AM	Bypass valve closed
7/3/2012	11:22:10 AM	H2 valve opened
7/3/2012	11:22:10 AM	Bubbler valve opened
7/3/2012	11:22:10 AM	Helium MFC set to  0.000000
7/3/2012	11:22:10 AM	H2 MFC set to  500.000000
7/3/2012	11:22:10 AM	BCl3 MFC set to  0.000000
7/3/2012	11:22:10 AM	PH3 MFC set to  0.000000
7/3/2012	11:22:10 AM	SiCl4 MFC set to  0.000000
7/3/2012	11:22:10 AM	Bypass solenoid MFC set to  0.000000
7/3/2012	11:22:10 AM	Tube furnace set to 0
7/3/2012	11:22:11 AM	Helium valve closed
7/3/2012	11:22:11 AM	BCl3 valve closed
7/3/2012	11:22:11 AM	PH3 valve closed
7/3/2012	11:22:11 AM	SiCl4 pre valve closed
7/3/2012	11:22:11 AM	SiCl4 post valve closed
7/3/2012	11:22:11 AM	Main Vac valve closed
7/3/2012	11:22:11 AM	Bypass valve closed
7/3/2012	11:22:11 AM	H2 valve opened
7/3/2012	11:22:11 AM	Bubbler valve opened
7/3/2012	11:22:11 AM	Helium MFC set to  0.000000
7/3/2012	11:22:11 AM	H2 MFC set to  500.000000
7/3/2012	11:22:11 AM	BCl3 MFC set to  0.000000
7/3/2012	11:22:11 AM	PH3 MFC set to  0.000000
7/3/2012	11:22:11 AM	SiCl4 MFC set to  0.000000
7/3/2012	11:22:11 AM	Bypass solenoid MFC set to  0.000000
7/3/2012	11:22:11 AM	Tube furnace set to 1000
7/3/2012	11:47:11 AM	Helium valve closed
7/3/2012	11:47:11 AM	PH3 valve closed
7/3/2012	11:47:11 AM	Main Vac valve closed
7/3/2012	11:47:11 AM	Bypass valve closed
7/3/2012	11:47:11 AM	H2 valve opened
7/3/2012	11:47:11 AM	BCl3 valve opened
7/3/2012	11:47:11 AM	SiCl4 pre valve opened
7/3/2012	11:47:11 AM	SiCl4 post valve opened
7/3/2012	11:47:11 AM	Bubbler valve opened
7/3/2012	11:47:11 AM	Helium MFC set to  0.000000
7/3/2012	11:47:11 AM	H2 MFC set to  450.000000
7/3/2012	11:47:11 AM	BCl3 MFC set to  0.750000
7/3/2012	11:47:11 AM	PH3 MFC set to  0.000000
7/3/2012	11:47:11 AM	SiCl4 MFC set to  50.000000
7/3/2012	11:47:11 AM	Bypass solenoid MFC set to  0.000000
7/3/2012	11:47:11 AM	Tube furnace set to 1000
7/3/2012	12:15:11 PM	Helium valve closed
7/3/2012	12:15:11 PM	BCl3 valve closed
7/3/2012	12:15:11 PM	PH3 valve closed
7/3/2012	12:15:11 PM	SiCl4 pre valve closed
7/3/2012	12:15:11 PM	SiCl4 post valve closed
7/3/2012	12:15:11 PM	Main Vac valve closed
7/3/2012	12:15:11 PM	Bypass valve closed
7/3/2012	12:15:11 PM	H2 valve opened
7/3/2012	12:15:11 PM	Bubbler valve opened
7/3/2012	12:15:11 PM	Helium MFC set to  0.000000
7/3/2012	12:15:11 PM	H2 MFC set to  500.000000
7/3/2012	12:15:11 PM	BCl3 MFC set to  0.000000
7/3/2012	12:15:11 PM	PH3 MFC set to  0.000000
7/3/2012	12:15:11 PM	SiCl4 MFC set to  0.000000
7/3/2012	12:15:11 PM	Bypass solenoid MFC set to  0.000000
7/3/2012	12:15:11 PM	Tube furnace set to 750
7/3/2012	12:30:11 PM	H2 valve closed
7/3/2012	12:30:11 PM	BCl3 valve closed
7/3/2012	12:30:11 PM	PH3 valve closed
7/3/2012	12:30:11 PM	SiCl4 pre valve closed
7/3/2012	12:30:11 PM	SiCl4 post valve closed
7/3/2012	12:30:11 PM	Main Vac valve closed
7/3/2012	12:30:11 PM	Bypass valve closed
7/3/2012	12:30:11 PM	Helium valve opened
7/3/2012	12:30:11 PM	Bubbler valve opened
7/3/2012	12:30:11 PM	Helium MFC set to  500.000000
7/3/2012	12:30:11 PM	H2 MFC set to  0.000000
7/3/2012	12:30:11 PM	BCl3 MFC set to  0.000000
7/3/2012	12:30:11 PM	PH3 MFC set to  0.000000
7/3/2012	12:30:11 PM	SiCl4 MFC set to  0.000000
7/3/2012	12:30:11 PM	Bypass solenoid MFC set to  0.000000
7/3/2012	12:30:12 PM	Tube furnace set to 0
7/3/2012	12:50:12 PM	Helium valve closed
7/3/2012	12:50:12 PM	H2 valve closed
7/3/2012	12:50:12 PM	BCl3 valve closed
7/3/2012	12:50:12 PM	PH3 valve closed
7/3/2012	12:50:12 PM	SiCl4 pre valve closed
7/3/2012	12:50:12 PM	SiCl4 post valve closed
7/3/2012	12:50:12 PM	Main Vac valve closed
7/3/2012	12:50:12 PM	Bypass valve closed
7/3/2012	12:50:12 PM	Bubbler valve closed
7/3/2012	12:50:12 PM	Helium MFC set to  0.000000
7/3/2012	12:50:12 PM	H2 MFC set to  0.000000
7/3/2012	12:50:12 PM	BCl3 MFC set to  0.000000
7/3/2012	12:50:12 PM	PH3 MFC set to  0.000000
7/3/2012	12:50:12 PM	SiCl4 MFC set to  0.000000
7/3/2012	12:50:12 PM	Bypass solenoid MFC set to  0.000000
7/3/2012	12:50:12 PM	Tube furnace set to 0
7/3/2012	12:53:12 PM	Helium valve closed
7/3/2012	12:53:12 PM	H2 valve closed
7/3/2012	12:53:12 PM	BCl3 valve closed
7/3/2012	12:53:12 PM	PH3 valve closed
7/3/2012	12:53:12 PM	SiCl4 pre valve closed
7/3/2012	12:53:12 PM	SiCl4 post valve closed
7/3/2012	12:53:12 PM	Main Vac valve closed
7/3/2012	12:53:12 PM	Bubbler valve closed
7/3/2012	12:53:12 PM	Bypass valve opened
7/3/2012	12:53:12 PM	Helium MFC set to  0.000000
7/3/2012	12:53:12 PM	H2 MFC set to  0.000000
7/3/2012	12:53:12 PM	BCl3 MFC set to  0.000000
7/3/2012	12:53:12 PM	PH3 MFC set to  0.000000
7/3/2012	12:53:12 PM	SiCl4 MFC set to  0.000000
7/3/2012	12:53:12 PM	Bypass solenoid MFC set to  0.000000
7/3/2012	12:53:12 PM	Tube furnace set to 0
7/3/2012	12:54:02 PM	Helium valve closed
7/3/2012	12:54:02 PM	H2 valve closed
7/3/2012	12:54:02 PM	BCl3 valve closed
7/3/2012	12:54:02 PM	PH3 valve closed
7/3/2012	12:54:02 PM	SiCl4 pre valve closed
7/3/2012	12:54:02 PM	SiCl4 post valve closed
7/3/2012	12:54:02 PM	Main Vac valve closed
7/3/2012	12:54:02 PM	Bubbler valve closed
7/3/2012	12:54:02 PM	Bypass valve opened
7/3/2012	12:54:02 PM	Helium MFC set to  0.000000
7/3/2012	12:54:02 PM	H2 MFC set to  0.000000
7/3/2012	12:54:02 PM	BCl3 MFC set to  0.000000
7/3/2012	12:54:02 PM	PH3 MFC set to  0.000000
7/3/2012	12:54:02 PM	SiCl4 MFC set to  0.000000
7/3/2012	12:54:02 PM	Bypass solenoid MFC set to  0.000000
7/3/2012	12:54:02 PM	Tube furnace set to 0
7/3/2012	12:55:02 PM	Helium valve closed
7/3/2012	12:55:02 PM	H2 valve closed
7/3/2012	12:55:02 PM	BCl3 valve closed
7/3/2012	12:55:02 PM	PH3 valve closed
7/3/2012	12:55:02 PM	SiCl4 pre valve closed
7/3/2012	12:55:02 PM	SiCl4 post valve closed
7/3/2012	12:55:02 PM	Bypass valve closed
7/3/2012	12:55:02 PM	Bubbler valve closed
7/3/2012	12:55:02 PM	Main Vac valve opened
7/3/2012	12:55:02 PM	Helium MFC set to  0.000000
7/3/2012	12:55:02 PM	H2 MFC set to  0.000000
7/3/2012	12:55:02 PM	BCl3 MFC set to  0.000000
7/3/2012	12:55:02 PM	PH3 MFC set to  0.000000
7/3/2012	12:55:02 PM	SiCl4 MFC set to  0.000000
7/3/2012	12:55:02 PM	Bypass solenoid MFC set to  0.000000
7/3/2012	12:55:02 PM	Tube furnace set to 0
7/3/2012	1:25:44 PM	Run finished at 1:25 PM
7/3/2012	1:31:01 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
7/3/2012	1:31:02 PM	Recipe started at 1:31 PM
7/3/2012	1:31:02 PM	Helium valve closed
7/3/2012	1:31:02 PM	H2 valve closed
7/3/2012	1:31:02 PM	BCl3 valve closed
7/3/2012	1:31:02 PM	PH3 valve closed
7/3/2012	1:31:02 PM	SiCl4 pre valve closed
7/3/2012	1:31:02 PM	SiCl4 post valve closed
7/3/2012	1:31:02 PM	Main Vac valve closed
7/3/2012	1:31:02 PM	Bypass valve closed
7/3/2012	1:31:02 PM	Bubbler valve closed
7/3/2012	1:31:02 PM	Helium MFC set to  0.000000
7/3/2012	1:31:02 PM	H2 MFC set to  0.000000
7/3/2012	1:31:02 PM	BCl3 MFC set to  0.000000
7/3/2012	1:31:02 PM	PH3 MFC set to  0.000000
7/3/2012	1:31:02 PM	SiCl4 MFC set to  0.000000
7/3/2012	1:31:02 PM	Bypass solenoid MFC set to  0.000000
7/3/2012	1:31:02 PM	Tube furnace set to 0
7/3/2012	1:31:05 PM	H2 valve closed
7/3/2012	1:31:05 PM	BCl3 valve closed
7/3/2012	1:31:05 PM	PH3 valve closed
7/3/2012	1:31:05 PM	SiCl4 pre valve closed
7/3/2012	1:31:05 PM	SiCl4 post valve closed
7/3/2012	1:31:05 PM	Main Vac valve closed
7/3/2012	1:31:05 PM	Bypass valve closed
7/3/2012	1:31:05 PM	Bubbler valve closed
7/3/2012	1:31:05 PM	Helium valve opened
7/3/2012	1:31:05 PM	Helium MFC set to  500.000000
7/3/2012	1:31:05 PM	H2 MFC set to  0.000000
7/3/2012	1:31:05 PM	BCl3 MFC set to  0.000000
7/3/2012	1:31:05 PM	PH3 MFC set to  0.000000
7/3/2012	1:31:05 PM	SiCl4 MFC set to  0.000000
7/3/2012	1:31:05 PM	Bypass solenoid MFC set to  0.000000
7/3/2012	1:31:05 PM	Tube furnace set to 0
7/3/2012	1:32:14 PM	Helium valve closed
7/3/2012	1:32:14 PM	H2 valve closed
7/3/2012	1:32:14 PM	BCl3 valve closed
7/3/2012	1:32:14 PM	PH3 valve closed
7/3/2012	1:32:14 PM	SiCl4 pre valve closed
7/3/2012	1:32:14 PM	SiCl4 post valve closed
7/3/2012	1:32:14 PM	Main Vac valve closed
7/3/2012	1:32:14 PM	Bypass valve closed
7/3/2012	1:32:14 PM	Bubbler valve closed
7/3/2012	1:32:14 PM	Helium MFC set to  0.000000
7/3/2012	1:32:14 PM	H2 MFC set to  0.000000
7/3/2012	1:32:14 PM	BCl3 MFC set to  0.000000
7/3/2012	1:32:14 PM	PH3 MFC set to  0.000000
7/3/2012	1:32:15 PM	SiCl4 MFC set to  0.000000
7/3/2012	1:32:15 PM	Bypass solenoid MFC set to  0.000000
7/3/2012	1:32:15 PM	Tube furnace set to 0
7/3/2012	1:32:16 PM	Run finished at 1:32 PM
7/3/2012	1:32:16 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
7/3/2012	1:35:44 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
7/3/2012	1:35:45 PM	Recipe started at 1:35 PM
7/3/2012	1:35:45 PM	Helium valve closed
7/3/2012	1:35:45 PM	H2 valve closed
7/3/2012	1:35:45 PM	BCl3 valve closed
7/3/2012	1:35:45 PM	PH3 valve closed
7/3/2012	1:35:45 PM	SiCl4 pre valve closed
7/3/2012	1:35:45 PM	SiCl4 post valve closed
7/3/2012	1:35:45 PM	Main Vac valve closed
7/3/2012	1:35:45 PM	Bubbler valve closed
7/3/2012	1:35:45 PM	Bypass valve opened
7/3/2012	1:35:45 PM	Helium MFC set to  0.000000
7/3/2012	1:35:45 PM	H2 MFC set to  0.000000
7/3/2012	1:35:45 PM	BCl3 MFC set to  0.000000
7/3/2012	1:35:45 PM	PH3 MFC set to  0.000000
7/3/2012	1:35:45 PM	SiCl4 MFC set to  0.000000
7/3/2012	1:35:45 PM	Bypass solenoid MFC set to  0.000000
7/3/2012	1:35:45 PM	Tube furnace set to 0
7/3/2012	1:36:54 PM	Helium valve closed
7/3/2012	1:36:54 PM	H2 valve closed
7/3/2012	1:36:54 PM	BCl3 valve closed
7/3/2012	1:36:54 PM	PH3 valve closed
7/3/2012	1:36:54 PM	SiCl4 pre valve closed
7/3/2012	1:36:54 PM	SiCl4 post valve closed
7/3/2012	1:36:54 PM	Main Vac valve closed
7/3/2012	1:36:54 PM	Bubbler valve closed
7/3/2012	1:36:54 PM	Bypass valve opened
7/3/2012	1:36:54 PM	Helium MFC set to  0.000000
7/3/2012	1:36:54 PM	H2 MFC set to  0.000000
7/3/2012	1:36:54 PM	BCl3 MFC set to  0.000000
7/3/2012	1:36:54 PM	PH3 MFC set to  0.000000
7/3/2012	1:36:54 PM	SiCl4 MFC set to  0.000000
7/3/2012	1:36:54 PM	Bypass solenoid MFC set to  0.000000
7/3/2012	1:36:54 PM	Tube furnace set to 0
7/3/2012	1:37:54 PM	Helium valve closed
7/3/2012	1:37:54 PM	H2 valve closed
7/3/2012	1:37:54 PM	BCl3 valve closed
7/3/2012	1:37:54 PM	PH3 valve closed
7/3/2012	1:37:54 PM	SiCl4 pre valve closed
7/3/2012	1:37:54 PM	SiCl4 post valve closed
7/3/2012	1:37:54 PM	Bypass valve closed
7/3/2012	1:37:54 PM	Bubbler valve closed
7/3/2012	1:37:54 PM	Main Vac valve opened
7/3/2012	1:37:54 PM	Helium MFC set to  0.000000
7/3/2012	1:37:54 PM	H2 MFC set to  0.000000
7/3/2012	1:37:54 PM	BCl3 MFC set to  0.000000
7/3/2012	1:37:54 PM	PH3 MFC set to  0.000000
7/3/2012	1:37:54 PM	SiCl4 MFC set to  0.000000
7/3/2012	1:37:54 PM	Bypass solenoid MFC set to  0.000000
7/3/2012	1:37:54 PM	Tube furnace set to 0
7/3/2012	1:37:55 PM	Run finished at 1:37 PM
7/3/2012	1:37:55 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
7/3/2012	3:14:49 PM	Main Vac valve closed
7/3/2012	3:15:02 PM	Main Vac valve opened
7/3/2012	3:17:02 PM	Recipe started at 3:17 PM
7/3/2012	3:17:02 PM	Helium valve closed
7/3/2012	3:17:02 PM	H2 valve closed
7/3/2012	3:17:02 PM	BCl3 valve closed
7/3/2012	3:17:02 PM	PH3 valve closed
7/3/2012	3:17:02 PM	SiCl4 pre valve closed
7/3/2012	3:17:02 PM	SiCl4 post valve closed
7/3/2012	3:17:02 PM	Bypass valve closed
7/3/2012	3:17:02 PM	Bubbler valve closed
7/3/2012	3:17:02 PM	Main Vac valve opened
7/3/2012	3:17:02 PM	Helium MFC set to  0.000000
7/3/2012	3:17:02 PM	H2 MFC set to  0.000000
7/3/2012	3:17:02 PM	BCl3 MFC set to  0.000000
7/3/2012	3:17:02 PM	PH3 MFC set to  0.000000
7/3/2012	3:17:02 PM	SiCl4 MFC set to  0.000000
7/3/2012	3:17:02 PM	Bypass solenoid MFC set to  0.000000
7/3/2012	3:17:03 PM	Tube furnace set to 0
7/3/2012	3:17:06 PM	Helium valve closed
7/3/2012	3:17:06 PM	H2 valve closed
7/3/2012	3:17:06 PM	BCl3 valve closed
7/3/2012	3:17:06 PM	PH3 valve closed
7/3/2012	3:17:06 PM	SiCl4 pre valve closed
7/3/2012	3:17:06 PM	SiCl4 post valve closed
7/3/2012	3:17:06 PM	Main Vac valve closed
7/3/2012	3:17:06 PM	Bypass valve closed
7/3/2012	3:17:06 PM	Bubbler valve closed
7/3/2012	3:17:06 PM	Helium MFC set to  0.000000
7/3/2012	3:17:06 PM	H2 MFC set to  0.000000
7/3/2012	3:17:06 PM	BCl3 MFC set to  0.000000
7/3/2012	3:17:06 PM	PH3 MFC set to  0.000000
7/3/2012	3:17:06 PM	SiCl4 MFC set to  0.000000
7/3/2012	3:17:06 PM	Bypass solenoid MFC set to  0.000000
7/3/2012	3:17:06 PM	Tube furnace set to 0
7/3/2012	3:17:09 PM	Helium valve closed
7/3/2012	3:17:09 PM	BCl3 valve closed
7/3/2012	3:17:09 PM	PH3 valve closed
7/3/2012	3:17:09 PM	SiCl4 pre valve closed
7/3/2012	3:17:09 PM	SiCl4 post valve closed
7/3/2012	3:17:09 PM	Main Vac valve closed
7/3/2012	3:17:09 PM	Bypass valve closed
7/3/2012	3:17:09 PM	Bubbler valve closed
7/3/2012	3:17:09 PM	H2 valve opened
7/3/2012	3:17:09 PM	Helium MFC set to  0.000000
7/3/2012	3:17:09 PM	H2 MFC set to  500.000000
7/3/2012	3:17:09 PM	BCl3 MFC set to  0.000000
7/3/2012	3:17:09 PM	PH3 MFC set to  0.000000
7/3/2012	3:17:09 PM	SiCl4 MFC set to  0.000000
7/3/2012	3:17:09 PM	Bypass solenoid MFC set to  0.000000
7/3/2012	3:17:09 PM	Tube furnace set to 0
7/3/2012	3:18:23 PM	Helium valve closed
7/3/2012	3:18:23 PM	BCl3 valve closed
7/3/2012	3:18:23 PM	PH3 valve closed
7/3/2012	3:18:23 PM	SiCl4 pre valve closed
7/3/2012	3:18:23 PM	SiCl4 post valve closed
7/3/2012	3:18:23 PM	Main Vac valve closed
7/3/2012	3:18:23 PM	Bypass valve closed
7/3/2012	3:18:23 PM	H2 valve opened
7/3/2012	3:18:23 PM	Bubbler valve opened
7/3/2012	3:18:23 PM	Helium MFC set to  0.000000
7/3/2012	3:18:23 PM	H2 MFC set to  500.000000
7/3/2012	3:18:23 PM	BCl3 MFC set to  0.000000
7/3/2012	3:18:23 PM	PH3 MFC set to  0.000000
7/3/2012	3:18:23 PM	SiCl4 MFC set to  0.000000
7/3/2012	3:18:23 PM	Bypass solenoid MFC set to  0.000000
7/3/2012	3:18:23 PM	Tube furnace set to 0
7/3/2012	3:18:24 PM	Helium valve closed
7/3/2012	3:18:24 PM	BCl3 valve closed
7/3/2012	3:18:24 PM	PH3 valve closed
7/3/2012	3:18:24 PM	SiCl4 pre valve closed
7/3/2012	3:18:24 PM	SiCl4 post valve closed
7/3/2012	3:18:24 PM	Main Vac valve closed
7/3/2012	3:18:24 PM	Bypass valve closed
7/3/2012	3:18:24 PM	H2 valve opened
7/3/2012	3:18:24 PM	Bubbler valve opened
7/3/2012	3:18:24 PM	Helium MFC set to  0.000000
7/3/2012	3:18:24 PM	H2 MFC set to  500.000000
7/3/2012	3:18:24 PM	BCl3 MFC set to  0.000000
7/3/2012	3:18:24 PM	PH3 MFC set to  0.000000
7/3/2012	3:18:24 PM	SiCl4 MFC set to  0.000000
7/3/2012	3:18:24 PM	Bypass solenoid MFC set to  0.000000
7/3/2012	3:18:24 PM	Tube furnace set to 1000
7/3/2012	3:43:24 PM	Helium valve closed
7/3/2012	3:43:24 PM	PH3 valve closed
7/3/2012	3:43:24 PM	Main Vac valve closed
7/3/2012	3:43:24 PM	Bypass valve closed
7/3/2012	3:43:24 PM	H2 valve opened
7/3/2012	3:43:24 PM	BCl3 valve opened
7/3/2012	3:43:24 PM	SiCl4 pre valve opened
7/3/2012	3:43:24 PM	SiCl4 post valve opened
7/3/2012	3:43:24 PM	Bubbler valve opened
7/3/2012	3:43:24 PM	Helium MFC set to  0.000000
7/3/2012	3:43:24 PM	H2 MFC set to  450.000000
7/3/2012	3:43:24 PM	BCl3 MFC set to  1.000000
7/3/2012	3:43:24 PM	PH3 MFC set to  0.000000
7/3/2012	3:43:24 PM	SiCl4 MFC set to  50.000000
7/3/2012	3:43:24 PM	Bypass solenoid MFC set to  0.000000
7/3/2012	3:43:24 PM	Tube furnace set to 1000
7/3/2012	4:11:24 PM	Helium valve closed
7/3/2012	4:11:24 PM	BCl3 valve closed
7/3/2012	4:11:24 PM	PH3 valve closed
7/3/2012	4:11:24 PM	SiCl4 pre valve closed
7/3/2012	4:11:24 PM	SiCl4 post valve closed
7/3/2012	4:11:24 PM	Main Vac valve closed
7/3/2012	4:11:24 PM	Bypass valve closed
7/3/2012	4:11:24 PM	H2 valve opened
7/3/2012	4:11:24 PM	Bubbler valve opened
7/3/2012	4:11:24 PM	Helium MFC set to  0.000000
7/3/2012	4:11:24 PM	H2 MFC set to  500.000000
7/3/2012	4:11:24 PM	BCl3 MFC set to  0.000000
7/3/2012	4:11:24 PM	PH3 MFC set to  0.000000
7/3/2012	4:11:25 PM	SiCl4 MFC set to  0.000000
7/3/2012	4:11:25 PM	Bypass solenoid MFC set to  0.000000
7/3/2012	4:11:25 PM	Tube furnace set to 750
7/3/2012	4:26:25 PM	H2 valve closed
7/3/2012	4:26:25 PM	BCl3 valve closed
7/3/2012	4:26:25 PM	PH3 valve closed
7/3/2012	4:26:25 PM	SiCl4 pre valve closed
7/3/2012	4:26:25 PM	SiCl4 post valve closed
7/3/2012	4:26:25 PM	Main Vac valve closed
7/3/2012	4:26:25 PM	Bypass valve closed
7/3/2012	4:26:25 PM	Helium valve opened
7/3/2012	4:26:25 PM	Bubbler valve opened
7/3/2012	4:26:25 PM	Helium MFC set to  500.000000
7/3/2012	4:26:25 PM	H2 MFC set to  0.000000
7/3/2012	4:26:25 PM	BCl3 MFC set to  0.000000
7/3/2012	4:26:25 PM	PH3 MFC set to  0.000000
7/3/2012	4:26:25 PM	SiCl4 MFC set to  0.000000
7/3/2012	4:26:25 PM	Bypass solenoid MFC set to  0.000000
7/3/2012	4:26:25 PM	Tube furnace set to 0
7/3/2012	4:46:25 PM	Helium valve closed
7/3/2012	4:46:25 PM	H2 valve closed
7/3/2012	4:46:25 PM	BCl3 valve closed
7/3/2012	4:46:25 PM	PH3 valve closed
7/3/2012	4:46:25 PM	SiCl4 pre valve closed
7/3/2012	4:46:25 PM	SiCl4 post valve closed
7/3/2012	4:46:25 PM	Main Vac valve closed
7/3/2012	4:46:25 PM	Bypass valve closed
7/3/2012	4:46:25 PM	Bubbler valve closed
7/3/2012	4:46:25 PM	Helium MFC set to  0.000000
7/3/2012	4:46:25 PM	H2 MFC set to  0.000000
7/3/2012	4:46:25 PM	BCl3 MFC set to  0.000000
7/3/2012	4:46:25 PM	PH3 MFC set to  0.000000
7/3/2012	4:46:25 PM	SiCl4 MFC set to  0.000000
7/3/2012	4:46:25 PM	Bypass solenoid MFC set to  0.000000
7/3/2012	4:46:25 PM	Tube furnace set to 0
7/3/2012	4:49:25 PM	Helium valve closed
7/3/2012	4:49:25 PM	H2 valve closed
7/3/2012	4:49:25 PM	BCl3 valve closed
7/3/2012	4:49:25 PM	PH3 valve closed
7/3/2012	4:49:25 PM	SiCl4 pre valve closed
7/3/2012	4:49:25 PM	SiCl4 post valve closed
7/3/2012	4:49:25 PM	Main Vac valve closed
7/3/2012	4:49:25 PM	Bubbler valve closed
7/3/2012	4:49:25 PM	Bypass valve opened
7/3/2012	4:49:25 PM	Helium MFC set to  0.000000
7/3/2012	4:49:25 PM	H2 MFC set to  0.000000
7/3/2012	4:49:25 PM	BCl3 MFC set to  0.000000
7/3/2012	4:49:25 PM	PH3 MFC set to  0.000000
7/3/2012	4:49:25 PM	SiCl4 MFC set to  0.000000
7/3/2012	4:49:25 PM	Bypass solenoid MFC set to  0.000000
7/3/2012	4:49:25 PM	Tube furnace set to 0
7/3/2012	4:50:21 PM	Helium valve closed
7/3/2012	4:50:21 PM	H2 valve closed
7/3/2012	4:50:21 PM	BCl3 valve closed
7/3/2012	4:50:21 PM	PH3 valve closed
7/3/2012	4:50:21 PM	SiCl4 pre valve closed
7/3/2012	4:50:21 PM	SiCl4 post valve closed
7/3/2012	4:50:21 PM	Main Vac valve closed
7/3/2012	4:50:21 PM	Bubbler valve closed
7/3/2012	4:50:21 PM	Bypass valve opened
7/3/2012	4:50:21 PM	Helium MFC set to  0.000000
7/3/2012	4:50:21 PM	H2 MFC set to  0.000000
7/3/2012	4:50:21 PM	BCl3 MFC set to  0.000000
7/3/2012	4:50:21 PM	PH3 MFC set to  0.000000
7/3/2012	4:50:21 PM	SiCl4 MFC set to  0.000000
7/3/2012	4:50:21 PM	Bypass solenoid MFC set to  0.000000
7/3/2012	4:50:22 PM	Tube furnace set to 0
7/3/2012	4:51:22 PM	Helium valve closed
7/3/2012	4:51:22 PM	H2 valve closed
7/3/2012	4:51:22 PM	BCl3 valve closed
7/3/2012	4:51:22 PM	PH3 valve closed
7/3/2012	4:51:22 PM	SiCl4 pre valve closed
7/3/2012	4:51:22 PM	SiCl4 post valve closed
7/3/2012	4:51:22 PM	Bypass valve closed
7/3/2012	4:51:22 PM	Bubbler valve closed
7/3/2012	4:51:22 PM	Main Vac valve opened
7/3/2012	4:51:22 PM	Helium MFC set to  0.000000
7/3/2012	4:51:22 PM	H2 MFC set to  0.000000
7/3/2012	4:51:22 PM	BCl3 MFC set to  0.000000
7/3/2012	4:51:22 PM	PH3 MFC set to  0.000000
7/3/2012	4:51:22 PM	SiCl4 MFC set to  0.000000
7/3/2012	4:51:22 PM	Bypass solenoid MFC set to  0.000000
7/3/2012	4:51:22 PM	Tube furnace set to 0
7/3/2012	4:54:10 PM	Run finished at 4:54 PM
7/3/2012	4:54:12 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
7/3/2012	4:54:13 PM	Recipe started at 4:54 PM
7/3/2012	4:54:13 PM	Helium valve closed
7/3/2012	4:54:13 PM	H2 valve closed
7/3/2012	4:54:13 PM	BCl3 valve closed
7/3/2012	4:54:13 PM	PH3 valve closed
7/3/2012	4:54:13 PM	SiCl4 pre valve closed
7/3/2012	4:54:13 PM	SiCl4 post valve closed
7/3/2012	4:54:13 PM	Main Vac valve closed
7/3/2012	4:54:13 PM	Bypass valve closed
7/3/2012	4:54:13 PM	Bubbler valve closed
7/3/2012	4:54:13 PM	Helium MFC set to  0.000000
7/3/2012	4:54:13 PM	H2 MFC set to  0.000000
7/3/2012	4:54:13 PM	BCl3 MFC set to  0.000000
7/3/2012	4:54:13 PM	PH3 MFC set to  0.000000
7/3/2012	4:54:13 PM	SiCl4 MFC set to  0.000000
7/3/2012	4:54:13 PM	Bypass solenoid MFC set to  0.000000
7/3/2012	4:54:14 PM	Tube furnace set to 0
7/3/2012	4:54:17 PM	H2 valve closed
7/3/2012	4:54:17 PM	BCl3 valve closed
7/3/2012	4:54:17 PM	PH3 valve closed
7/3/2012	4:54:17 PM	SiCl4 pre valve closed
7/3/2012	4:54:17 PM	SiCl4 post valve closed
7/3/2012	4:54:17 PM	Main Vac valve closed
7/3/2012	4:54:17 PM	Bypass valve closed
7/3/2012	4:54:17 PM	Bubbler valve closed
7/3/2012	4:54:17 PM	Helium valve opened
7/3/2012	4:54:17 PM	Helium MFC set to  500.000000
7/3/2012	4:54:17 PM	H2 MFC set to  0.000000
7/3/2012	4:54:17 PM	BCl3 MFC set to  0.000000
7/3/2012	4:54:17 PM	PH3 MFC set to  0.000000
7/3/2012	4:54:17 PM	SiCl4 MFC set to  0.000000
7/3/2012	4:54:17 PM	Bypass solenoid MFC set to  0.000000
7/3/2012	4:54:17 PM	Tube furnace set to 0
7/3/2012	4:55:27 PM	Helium valve closed
7/3/2012	4:55:27 PM	H2 valve closed
7/3/2012	4:55:27 PM	BCl3 valve closed
7/3/2012	4:55:27 PM	PH3 valve closed
7/3/2012	4:55:27 PM	SiCl4 pre valve closed
7/3/2012	4:55:27 PM	SiCl4 post valve closed
7/3/2012	4:55:27 PM	Main Vac valve closed
7/3/2012	4:55:27 PM	Bypass valve closed
7/3/2012	4:55:27 PM	Bubbler valve closed
7/3/2012	4:55:27 PM	Helium MFC set to  0.000000
7/3/2012	4:55:27 PM	H2 MFC set to  0.000000
7/3/2012	4:55:27 PM	BCl3 MFC set to  0.000000
7/3/2012	4:55:27 PM	PH3 MFC set to  0.000000
7/3/2012	4:55:27 PM	SiCl4 MFC set to  0.000000
7/3/2012	4:55:27 PM	Bypass solenoid MFC set to  0.000000
7/3/2012	4:55:27 PM	Tube furnace set to 0
7/3/2012	4:55:28 PM	Run finished at 4:55 PM
7/3/2012	4:55:28 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
7/3/2012	5:01:21 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
7/3/2012	5:01:22 PM	Recipe started at 5:01 PM
7/3/2012	5:01:22 PM	Helium valve closed
7/3/2012	5:01:22 PM	H2 valve closed
7/3/2012	5:01:22 PM	BCl3 valve closed
7/3/2012	5:01:22 PM	PH3 valve closed
7/3/2012	5:01:22 PM	SiCl4 pre valve closed
7/3/2012	5:01:22 PM	SiCl4 post valve closed
7/3/2012	5:01:22 PM	Main Vac valve closed
7/3/2012	5:01:22 PM	Bubbler valve closed
7/3/2012	5:01:22 PM	Bypass valve opened
7/3/2012	5:01:22 PM	Helium MFC set to  0.000000
7/3/2012	5:01:22 PM	H2 MFC set to  0.000000
7/3/2012	5:01:22 PM	BCl3 MFC set to  0.000000
7/3/2012	5:01:22 PM	PH3 MFC set to  0.000000
7/3/2012	5:01:22 PM	SiCl4 MFC set to  0.000000
7/3/2012	5:01:22 PM	Bypass solenoid MFC set to  0.000000
7/3/2012	5:01:22 PM	Tube furnace set to 0
7/3/2012	5:02:32 PM	Helium valve closed
7/3/2012	5:02:32 PM	H2 valve closed
7/3/2012	5:02:32 PM	BCl3 valve closed
7/3/2012	5:02:32 PM	PH3 valve closed
7/3/2012	5:02:32 PM	SiCl4 pre valve closed
7/3/2012	5:02:32 PM	SiCl4 post valve closed
7/3/2012	5:02:32 PM	Main Vac valve closed
7/3/2012	5:02:32 PM	Bubbler valve closed
7/3/2012	5:02:32 PM	Bypass valve opened
7/3/2012	5:02:32 PM	Helium MFC set to  0.000000
7/3/2012	5:02:32 PM	H2 MFC set to  0.000000
7/3/2012	5:02:32 PM	BCl3 MFC set to  0.000000
7/3/2012	5:02:32 PM	PH3 MFC set to  0.000000
7/3/2012	5:02:32 PM	SiCl4 MFC set to  0.000000
7/3/2012	5:02:32 PM	Bypass solenoid MFC set to  0.000000
7/3/2012	5:02:32 PM	Tube furnace set to 0
7/3/2012	5:03:32 PM	Helium valve closed
7/3/2012	5:03:32 PM	H2 valve closed
7/3/2012	5:03:32 PM	BCl3 valve closed
7/3/2012	5:03:32 PM	PH3 valve closed
7/3/2012	5:03:32 PM	SiCl4 pre valve closed
7/3/2012	5:03:32 PM	SiCl4 post valve closed
7/3/2012	5:03:32 PM	Bypass valve closed
7/3/2012	5:03:32 PM	Bubbler valve closed
7/3/2012	5:03:32 PM	Main Vac valve opened
7/3/2012	5:03:32 PM	Helium MFC set to  0.000000
7/3/2012	5:03:32 PM	H2 MFC set to  0.000000
7/3/2012	5:03:32 PM	BCl3 MFC set to  0.000000
7/3/2012	5:03:32 PM	PH3 MFC set to  0.000000
7/3/2012	5:03:32 PM	SiCl4 MFC set to  0.000000
7/3/2012	5:03:32 PM	Bypass solenoid MFC set to  0.000000
7/3/2012	5:03:33 PM	Tube furnace set to 0
7/3/2012	5:03:34 PM	Run finished at 5:03 PM
7/3/2012	5:03:34 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
7/3/2012	5:04:05 PM	Recipe started at 5:04 PM
7/3/2012	5:04:05 PM	Helium valve closed
7/3/2012	5:04:05 PM	H2 valve closed
7/3/2012	5:04:05 PM	BCl3 valve closed
7/3/2012	5:04:05 PM	PH3 valve closed
7/3/2012	5:04:05 PM	SiCl4 pre valve closed
7/3/2012	5:04:05 PM	SiCl4 post valve closed
7/3/2012	5:04:05 PM	Bypass valve closed
7/3/2012	5:04:05 PM	Bubbler valve closed
7/3/2012	5:04:05 PM	Main Vac valve opened
7/3/2012	5:04:05 PM	Helium MFC set to  0.000000
7/3/2012	5:04:05 PM	H2 MFC set to  0.000000
7/3/2012	5:04:05 PM	BCl3 MFC set to  0.000000
7/3/2012	5:04:05 PM	PH3 MFC set to  0.000000
7/3/2012	5:04:05 PM	SiCl4 MFC set to  0.000000
7/3/2012	5:04:05 PM	Bypass solenoid MFC set to  0.000000
7/3/2012	5:04:05 PM	Tube furnace set to 0
7/3/2012	6:34:05 PM	Helium valve closed
7/3/2012	6:34:05 PM	H2 valve closed
7/3/2012	6:34:05 PM	BCl3 valve closed
7/3/2012	6:34:05 PM	PH3 valve closed
7/3/2012	6:34:05 PM	SiCl4 pre valve closed
7/3/2012	6:34:05 PM	SiCl4 post valve closed
7/3/2012	6:34:05 PM	Main Vac valve closed
7/3/2012	6:34:05 PM	Bypass valve closed
7/3/2012	6:34:05 PM	Bubbler valve closed
7/3/2012	6:34:05 PM	Helium MFC set to  0.000000
7/3/2012	6:34:05 PM	H2 MFC set to  0.000000
7/3/2012	6:34:05 PM	BCl3 MFC set to  0.000000
7/3/2012	6:34:05 PM	PH3 MFC set to  0.000000
7/3/2012	6:34:05 PM	SiCl4 MFC set to  0.000000
7/3/2012	6:34:05 PM	Bypass solenoid MFC set to  0.000000
7/3/2012	6:34:05 PM	Tube furnace set to 0
7/3/2012	6:34:08 PM	Helium valve closed
7/3/2012	6:34:08 PM	BCl3 valve closed
7/3/2012	6:34:08 PM	PH3 valve closed
7/3/2012	6:34:08 PM	SiCl4 pre valve closed
7/3/2012	6:34:08 PM	SiCl4 post valve closed
7/3/2012	6:34:08 PM	Main Vac valve closed
7/3/2012	6:34:08 PM	Bypass valve closed
7/3/2012	6:34:08 PM	Bubbler valve closed
7/3/2012	6:34:08 PM	H2 valve opened
7/3/2012	6:34:08 PM	Helium MFC set to  0.000000
7/3/2012	6:34:08 PM	H2 MFC set to  500.000000
7/3/2012	6:34:08 PM	BCl3 MFC set to  0.000000
7/3/2012	6:34:08 PM	PH3 MFC set to  0.000000
7/3/2012	6:34:08 PM	SiCl4 MFC set to  0.000000
7/3/2012	6:34:08 PM	Bypass solenoid MFC set to  0.000000
7/3/2012	6:34:09 PM	Tube furnace set to 0
7/3/2012	6:35:22 PM	Helium valve closed
7/3/2012	6:35:22 PM	BCl3 valve closed
7/3/2012	6:35:22 PM	PH3 valve closed
7/3/2012	6:35:22 PM	SiCl4 pre valve closed
7/3/2012	6:35:22 PM	SiCl4 post valve closed
7/3/2012	6:35:22 PM	Main Vac valve closed
7/3/2012	6:35:22 PM	Bypass valve closed
7/3/2012	6:35:22 PM	H2 valve opened
7/3/2012	6:35:22 PM	Bubbler valve opened
7/3/2012	6:35:22 PM	Helium MFC set to  0.000000
7/3/2012	6:35:22 PM	H2 MFC set to  500.000000
7/3/2012	6:35:22 PM	BCl3 MFC set to  0.000000
7/3/2012	6:35:22 PM	PH3 MFC set to  0.000000
7/3/2012	6:35:22 PM	SiCl4 MFC set to  0.000000
7/3/2012	6:35:22 PM	Bypass solenoid MFC set to  0.000000
7/3/2012	6:35:22 PM	Tube furnace set to 0
7/3/2012	6:35:23 PM	Helium valve closed
7/3/2012	6:35:23 PM	BCl3 valve closed
7/3/2012	6:35:23 PM	PH3 valve closed
7/3/2012	6:35:23 PM	SiCl4 pre valve closed
7/3/2012	6:35:23 PM	SiCl4 post valve closed
7/3/2012	6:35:23 PM	Main Vac valve closed
7/3/2012	6:35:23 PM	Bypass valve closed
7/3/2012	6:35:23 PM	H2 valve opened
7/3/2012	6:35:23 PM	Bubbler valve opened
7/3/2012	6:35:23 PM	Helium MFC set to  0.000000
7/3/2012	6:35:23 PM	H2 MFC set to  500.000000
7/3/2012	6:35:23 PM	BCl3 MFC set to  0.000000
7/3/2012	6:35:23 PM	PH3 MFC set to  0.000000
7/3/2012	6:35:23 PM	SiCl4 MFC set to  0.000000
7/3/2012	6:35:23 PM	Bypass solenoid MFC set to  0.000000
7/3/2012	6:35:23 PM	Tube furnace set to 1000
7/3/2012	7:00:23 PM	Helium valve closed
7/3/2012	7:00:23 PM	BCl3 valve closed
7/3/2012	7:00:23 PM	Main Vac valve closed
7/3/2012	7:00:23 PM	Bypass valve closed
7/3/2012	7:00:23 PM	H2 valve opened
7/3/2012	7:00:23 PM	PH3 valve opened
7/3/2012	7:00:23 PM	SiCl4 pre valve opened
7/3/2012	7:00:23 PM	SiCl4 post valve opened
7/3/2012	7:00:23 PM	Bubbler valve opened
7/3/2012	7:00:23 PM	Helium MFC set to  0.000000
7/3/2012	7:00:23 PM	H2 MFC set to  445.000000
7/3/2012	7:00:23 PM	BCl3 MFC set to  0.000000
7/3/2012	7:00:23 PM	PH3 MFC set to  5.000000
7/3/2012	7:00:23 PM	SiCl4 MFC set to  50.000000
7/3/2012	7:00:23 PM	Bypass solenoid MFC set to  0.000000
7/3/2012	7:00:23 PM	Tube furnace set to 1000
7/3/2012	7:28:23 PM	Helium valve closed
7/3/2012	7:28:23 PM	BCl3 valve closed
7/3/2012	7:28:23 PM	PH3 valve closed
7/3/2012	7:28:23 PM	SiCl4 pre valve closed
7/3/2012	7:28:23 PM	SiCl4 post valve closed
7/3/2012	7:28:23 PM	Main Vac valve closed
7/3/2012	7:28:23 PM	Bypass valve closed
7/3/2012	7:28:23 PM	H2 valve opened
7/3/2012	7:28:23 PM	Bubbler valve opened
7/3/2012	7:28:23 PM	Helium MFC set to  0.000000
7/3/2012	7:28:23 PM	H2 MFC set to  500.000000
7/3/2012	7:28:23 PM	BCl3 MFC set to  0.000000
7/3/2012	7:28:23 PM	PH3 MFC set to  0.000000
7/3/2012	7:28:23 PM	SiCl4 MFC set to  0.000000
7/3/2012	7:28:23 PM	Bypass solenoid MFC set to  0.000000
7/3/2012	7:28:24 PM	Tube furnace set to 750
7/3/2012	7:43:24 PM	H2 valve closed
7/3/2012	7:43:24 PM	BCl3 valve closed
7/3/2012	7:43:24 PM	PH3 valve closed
7/3/2012	7:43:24 PM	SiCl4 pre valve closed
7/3/2012	7:43:24 PM	SiCl4 post valve closed
7/3/2012	7:43:24 PM	Main Vac valve closed
7/3/2012	7:43:24 PM	Bypass valve closed
7/3/2012	7:43:24 PM	Helium valve opened
7/3/2012	7:43:24 PM	Bubbler valve opened
7/3/2012	7:43:24 PM	Helium MFC set to  500.000000
7/3/2012	7:43:24 PM	H2 MFC set to  0.000000
7/3/2012	7:43:24 PM	BCl3 MFC set to  0.000000
7/3/2012	7:43:24 PM	PH3 MFC set to  0.000000
7/3/2012	7:43:24 PM	SiCl4 MFC set to  0.000000
7/3/2012	7:43:24 PM	Bypass solenoid MFC set to  0.000000
7/3/2012	7:43:24 PM	Tube furnace set to 0
7/3/2012	8:03:24 PM	Helium valve closed
7/3/2012	8:03:24 PM	H2 valve closed
7/3/2012	8:03:24 PM	BCl3 valve closed
7/3/2012	8:03:24 PM	PH3 valve closed
7/3/2012	8:03:24 PM	SiCl4 pre valve closed
7/3/2012	8:03:24 PM	SiCl4 post valve closed
7/3/2012	8:03:24 PM	Main Vac valve closed
7/3/2012	8:03:24 PM	Bypass valve closed
7/3/2012	8:03:24 PM	Bubbler valve closed
7/3/2012	8:03:24 PM	Helium MFC set to  0.000000
7/3/2012	8:03:24 PM	H2 MFC set to  0.000000
7/3/2012	8:03:24 PM	BCl3 MFC set to  0.000000
7/3/2012	8:03:24 PM	PH3 MFC set to  0.000000
7/3/2012	8:03:24 PM	SiCl4 MFC set to  0.000000
7/3/2012	8:03:24 PM	Bypass solenoid MFC set to  0.000000
7/3/2012	8:03:24 PM	Tube furnace set to 0
7/3/2012	8:06:24 PM	Helium valve closed
7/3/2012	8:06:24 PM	H2 valve closed
7/3/2012	8:06:24 PM	BCl3 valve closed
7/3/2012	8:06:24 PM	PH3 valve closed
7/3/2012	8:06:24 PM	SiCl4 pre valve closed
7/3/2012	8:06:24 PM	SiCl4 post valve closed
7/3/2012	8:06:24 PM	Main Vac valve closed
7/3/2012	8:06:24 PM	Bubbler valve closed
7/3/2012	8:06:24 PM	Bypass valve opened
7/3/2012	8:06:24 PM	Helium MFC set to  0.000000
7/3/2012	8:06:24 PM	H2 MFC set to  0.000000
7/3/2012	8:06:24 PM	BCl3 MFC set to  0.000000
7/3/2012	8:06:24 PM	PH3 MFC set to  0.000000
7/3/2012	8:06:24 PM	SiCl4 MFC set to  0.000000
7/3/2012	8:06:24 PM	Bypass solenoid MFC set to  0.000000
7/3/2012	8:06:24 PM	Tube furnace set to 0
7/3/2012	8:07:15 PM	Helium valve closed
7/3/2012	8:07:15 PM	H2 valve closed
7/3/2012	8:07:15 PM	BCl3 valve closed
7/3/2012	8:07:15 PM	PH3 valve closed
7/3/2012	8:07:15 PM	SiCl4 pre valve closed
7/3/2012	8:07:15 PM	SiCl4 post valve closed
7/3/2012	8:07:15 PM	Main Vac valve closed
7/3/2012	8:07:15 PM	Bubbler valve closed
7/3/2012	8:07:15 PM	Bypass valve opened
7/3/2012	8:07:15 PM	Helium MFC set to  0.000000
7/3/2012	8:07:15 PM	H2 MFC set to  0.000000
7/3/2012	8:07:15 PM	BCl3 MFC set to  0.000000
7/3/2012	8:07:15 PM	PH3 MFC set to  0.000000
7/3/2012	8:07:15 PM	SiCl4 MFC set to  0.000000
7/3/2012	8:07:15 PM	Bypass solenoid MFC set to  0.000000
7/3/2012	8:07:16 PM	Tube furnace set to 0
7/3/2012	8:08:16 PM	Helium valve closed
7/3/2012	8:08:16 PM	H2 valve closed
7/3/2012	8:08:16 PM	BCl3 valve closed
7/3/2012	8:08:16 PM	PH3 valve closed
7/3/2012	8:08:16 PM	SiCl4 pre valve closed
7/3/2012	8:08:16 PM	SiCl4 post valve closed
7/3/2012	8:08:16 PM	Bypass valve closed
7/3/2012	8:08:16 PM	Bubbler valve closed
7/3/2012	8:08:16 PM	Main Vac valve opened
7/3/2012	8:08:16 PM	Helium MFC set to  0.000000
7/3/2012	8:08:16 PM	H2 MFC set to  0.000000
7/3/2012	8:08:16 PM	BCl3 MFC set to  0.000000
7/3/2012	8:08:16 PM	PH3 MFC set to  0.000000
7/3/2012	8:08:16 PM	SiCl4 MFC set to  0.000000
7/3/2012	8:08:16 PM	Bypass solenoid MFC set to  0.000000
7/3/2012	8:08:16 PM	Tube furnace set to 0
7/3/2012	8:51:22 PM	Run finished at 8:51 PM
7/3/2012	8:54:18 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
7/3/2012	8:54:19 PM	Recipe started at 8:54 PM
7/3/2012	8:54:19 PM	Helium valve closed
7/3/2012	8:54:19 PM	H2 valve closed
7/3/2012	8:54:19 PM	BCl3 valve closed
7/3/2012	8:54:19 PM	PH3 valve closed
7/3/2012	8:54:19 PM	SiCl4 pre valve closed
7/3/2012	8:54:19 PM	SiCl4 post valve closed
7/3/2012	8:54:19 PM	Main Vac valve closed
7/3/2012	8:54:19 PM	Bypass valve closed
7/3/2012	8:54:19 PM	Bubbler valve closed
7/3/2012	8:54:19 PM	Helium MFC set to  0.000000
7/3/2012	8:54:19 PM	H2 MFC set to  0.000000
7/3/2012	8:54:19 PM	BCl3 MFC set to  0.000000
7/3/2012	8:54:19 PM	PH3 MFC set to  0.000000
7/3/2012	8:54:19 PM	SiCl4 MFC set to  0.000000
7/3/2012	8:54:19 PM	Bypass solenoid MFC set to  0.000000
7/3/2012	8:54:19 PM	Tube furnace set to 0
7/3/2012	8:54:22 PM	H2 valve closed
7/3/2012	8:54:22 PM	BCl3 valve closed
7/3/2012	8:54:22 PM	PH3 valve closed
7/3/2012	8:54:22 PM	SiCl4 pre valve closed
7/3/2012	8:54:22 PM	SiCl4 post valve closed
7/3/2012	8:54:22 PM	Main Vac valve closed
7/3/2012	8:54:22 PM	Bypass valve closed
7/3/2012	8:54:22 PM	Bubbler valve closed
7/3/2012	8:54:22 PM	Helium valve opened
7/3/2012	8:54:22 PM	Helium MFC set to  500.000000
7/3/2012	8:54:22 PM	H2 MFC set to  0.000000
7/3/2012	8:54:22 PM	BCl3 MFC set to  0.000000
7/3/2012	8:54:22 PM	PH3 MFC set to  0.000000
7/3/2012	8:54:22 PM	SiCl4 MFC set to  0.000000
7/3/2012	8:54:22 PM	Bypass solenoid MFC set to  0.000000
7/3/2012	8:54:22 PM	Tube furnace set to 0
7/3/2012	8:55:32 PM	Helium valve closed
7/3/2012	8:55:32 PM	H2 valve closed
7/3/2012	8:55:32 PM	BCl3 valve closed
7/3/2012	8:55:32 PM	PH3 valve closed
7/3/2012	8:55:32 PM	SiCl4 pre valve closed
7/3/2012	8:55:32 PM	SiCl4 post valve closed
7/3/2012	8:55:32 PM	Main Vac valve closed
7/3/2012	8:55:32 PM	Bypass valve closed
7/3/2012	8:55:32 PM	Bubbler valve closed
7/3/2012	8:55:32 PM	Helium MFC set to  0.000000
7/3/2012	8:55:32 PM	H2 MFC set to  0.000000
7/3/2012	8:55:32 PM	BCl3 MFC set to  0.000000
7/3/2012	8:55:32 PM	PH3 MFC set to  0.000000
7/3/2012	8:55:32 PM	SiCl4 MFC set to  0.000000
7/3/2012	8:55:32 PM	Bypass solenoid MFC set to  0.000000
7/3/2012	8:55:32 PM	Tube furnace set to 0
7/3/2012	8:55:33 PM	Run finished at 8:55 PM
7/3/2012	8:55:33 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
7/3/2012	9:00:44 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
7/3/2012	9:00:45 PM	Recipe started at 9:00 PM
7/3/2012	9:00:45 PM	Helium valve closed
7/3/2012	9:00:45 PM	H2 valve closed
7/3/2012	9:00:45 PM	BCl3 valve closed
7/3/2012	9:00:45 PM	PH3 valve closed
7/3/2012	9:00:45 PM	SiCl4 pre valve closed
7/3/2012	9:00:45 PM	SiCl4 post valve closed
7/3/2012	9:00:45 PM	Main Vac valve closed
7/3/2012	9:00:45 PM	Bubbler valve closed
7/3/2012	9:00:45 PM	Bypass valve opened
7/3/2012	9:00:45 PM	Helium MFC set to  0.000000
7/3/2012	9:00:45 PM	H2 MFC set to  0.000000
7/3/2012	9:00:45 PM	BCl3 MFC set to  0.000000
7/3/2012	9:00:45 PM	PH3 MFC set to  0.000000
7/3/2012	9:00:45 PM	SiCl4 MFC set to  0.000000
7/3/2012	9:00:45 PM	Bypass solenoid MFC set to  0.000000
7/3/2012	9:00:45 PM	Tube furnace set to 0
7/3/2012	9:01:54 PM	Helium valve closed
7/3/2012	9:01:54 PM	H2 valve closed
7/3/2012	9:01:54 PM	BCl3 valve closed
7/3/2012	9:01:54 PM	PH3 valve closed
7/3/2012	9:01:54 PM	SiCl4 pre valve closed
7/3/2012	9:01:54 PM	SiCl4 post valve closed
7/3/2012	9:01:54 PM	Main Vac valve closed
7/3/2012	9:01:54 PM	Bubbler valve closed
7/3/2012	9:01:54 PM	Bypass valve opened
7/3/2012	9:01:54 PM	Helium MFC set to  0.000000
7/3/2012	9:01:54 PM	H2 MFC set to  0.000000
7/3/2012	9:01:54 PM	BCl3 MFC set to  0.000000
7/3/2012	9:01:54 PM	PH3 MFC set to  0.000000
7/3/2012	9:01:54 PM	SiCl4 MFC set to  0.000000
7/3/2012	9:01:54 PM	Bypass solenoid MFC set to  0.000000
7/3/2012	9:01:54 PM	Tube furnace set to 0
7/3/2012	9:02:54 PM	Helium valve closed
7/3/2012	9:02:54 PM	H2 valve closed
7/3/2012	9:02:54 PM	BCl3 valve closed
7/3/2012	9:02:54 PM	PH3 valve closed
7/3/2012	9:02:54 PM	SiCl4 pre valve closed
7/3/2012	9:02:54 PM	SiCl4 post valve closed
7/3/2012	9:02:54 PM	Bypass valve closed
7/3/2012	9:02:54 PM	Bubbler valve closed
7/3/2012	9:02:54 PM	Main Vac valve opened
7/3/2012	9:02:54 PM	Helium MFC set to  0.000000
7/3/2012	9:02:54 PM	H2 MFC set to  0.000000
7/3/2012	9:02:54 PM	BCl3 MFC set to  0.000000
7/3/2012	9:02:54 PM	PH3 MFC set to  0.000000
7/3/2012	9:02:54 PM	SiCl4 MFC set to  0.000000
7/3/2012	9:02:54 PM	Bypass solenoid MFC set to  0.000000
7/3/2012	9:02:54 PM	Tube furnace set to 0
7/3/2012	9:02:55 PM	Run finished at 9:02 PM
7/3/2012	9:02:55 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
7/3/2012	9:03:39 PM	Recipe started at 9:03 PM
7/3/2012	9:03:39 PM	Helium valve closed
7/3/2012	9:03:39 PM	H2 valve closed
7/3/2012	9:03:39 PM	BCl3 valve closed
7/3/2012	9:03:39 PM	PH3 valve closed
7/3/2012	9:03:39 PM	SiCl4 pre valve closed
7/3/2012	9:03:39 PM	SiCl4 post valve closed
7/3/2012	9:03:39 PM	Bypass valve closed
7/3/2012	9:03:39 PM	Bubbler valve closed
7/3/2012	9:03:39 PM	Main Vac valve opened
7/3/2012	9:03:39 PM	Helium MFC set to  0.000000
7/3/2012	9:03:39 PM	H2 MFC set to  0.000000
7/3/2012	9:03:39 PM	BCl3 MFC set to  0.000000
7/3/2012	9:03:39 PM	PH3 MFC set to  0.000000
7/3/2012	9:03:39 PM	SiCl4 MFC set to  0.000000
7/3/2012	9:03:39 PM	Bypass solenoid MFC set to  0.000000
7/3/2012	9:03:39 PM	Tube furnace set to 0
7/3/2012	10:33:39 PM	Helium valve closed
7/3/2012	10:33:39 PM	H2 valve closed
7/3/2012	10:33:39 PM	BCl3 valve closed
7/3/2012	10:33:39 PM	PH3 valve closed
7/3/2012	10:33:39 PM	SiCl4 pre valve closed
7/3/2012	10:33:39 PM	SiCl4 post valve closed
7/3/2012	10:33:39 PM	Main Vac valve closed
7/3/2012	10:33:39 PM	Bypass valve closed
7/3/2012	10:33:39 PM	Bubbler valve closed
7/3/2012	10:33:39 PM	Helium MFC set to  0.000000
7/3/2012	10:33:39 PM	H2 MFC set to  0.000000
7/3/2012	10:33:39 PM	BCl3 MFC set to  0.000000
7/3/2012	10:33:39 PM	PH3 MFC set to  0.000000
7/3/2012	10:33:39 PM	SiCl4 MFC set to  0.000000
7/3/2012	10:33:39 PM	Bypass solenoid MFC set to  0.000000
7/3/2012	10:33:39 PM	Tube furnace set to 0
7/3/2012	10:33:42 PM	Helium valve closed
7/3/2012	10:33:42 PM	BCl3 valve closed
7/3/2012	10:33:42 PM	PH3 valve closed
7/3/2012	10:33:42 PM	SiCl4 pre valve closed
7/3/2012	10:33:42 PM	SiCl4 post valve closed
7/3/2012	10:33:42 PM	Main Vac valve closed
7/3/2012	10:33:42 PM	Bypass valve closed
7/3/2012	10:33:42 PM	Bubbler valve closed
7/3/2012	10:33:42 PM	H2 valve opened
7/3/2012	10:33:42 PM	Helium MFC set to  0.000000
7/3/2012	10:33:42 PM	H2 MFC set to  500.000000
7/3/2012	10:33:42 PM	BCl3 MFC set to  0.000000
7/3/2012	10:33:42 PM	PH3 MFC set to  0.000000
7/3/2012	10:33:42 PM	SiCl4 MFC set to  0.000000
7/3/2012	10:33:43 PM	Bypass solenoid MFC set to  0.000000
7/3/2012	10:33:43 PM	Tube furnace set to 0
7/3/2012	10:34:57 PM	Helium valve closed
7/3/2012	10:34:57 PM	BCl3 valve closed
7/3/2012	10:34:57 PM	PH3 valve closed
7/3/2012	10:34:57 PM	SiCl4 pre valve closed
7/3/2012	10:34:57 PM	SiCl4 post valve closed
7/3/2012	10:34:57 PM	Main Vac valve closed
7/3/2012	10:34:57 PM	Bypass valve closed
7/3/2012	10:34:57 PM	H2 valve opened
7/3/2012	10:34:57 PM	Bubbler valve opened
7/3/2012	10:34:57 PM	Helium MFC set to  0.000000
7/3/2012	10:34:57 PM	H2 MFC set to  500.000000
7/3/2012	10:34:57 PM	BCl3 MFC set to  0.000000
7/3/2012	10:34:57 PM	PH3 MFC set to  0.000000
7/3/2012	10:34:57 PM	SiCl4 MFC set to  0.000000
7/3/2012	10:34:57 PM	Bypass solenoid MFC set to  0.000000
7/3/2012	10:34:57 PM	Tube furnace set to 0
7/3/2012	10:34:58 PM	Helium valve closed
7/3/2012	10:34:58 PM	BCl3 valve closed
7/3/2012	10:34:58 PM	PH3 valve closed
7/3/2012	10:34:58 PM	SiCl4 pre valve closed
7/3/2012	10:34:58 PM	SiCl4 post valve closed
7/3/2012	10:34:58 PM	Main Vac valve closed
7/3/2012	10:34:58 PM	Bypass valve closed
7/3/2012	10:34:58 PM	H2 valve opened
7/3/2012	10:34:58 PM	Bubbler valve opened
7/3/2012	10:34:58 PM	Helium MFC set to  0.000000
7/3/2012	10:34:58 PM	H2 MFC set to  500.000000
7/3/2012	10:34:58 PM	BCl3 MFC set to  0.000000
7/3/2012	10:34:58 PM	PH3 MFC set to  0.000000
7/3/2012	10:34:58 PM	SiCl4 MFC set to  0.000000
7/3/2012	10:34:58 PM	Bypass solenoid MFC set to  0.000000
7/3/2012	10:34:58 PM	Tube furnace set to 1000
7/3/2012	10:59:58 PM	Helium valve closed
7/3/2012	10:59:58 PM	BCl3 valve closed
7/3/2012	10:59:58 PM	Main Vac valve closed
7/3/2012	10:59:58 PM	Bypass valve closed
7/3/2012	10:59:58 PM	H2 valve opened
7/3/2012	10:59:58 PM	PH3 valve opened
7/3/2012	10:59:58 PM	SiCl4 pre valve opened
7/3/2012	10:59:58 PM	SiCl4 post valve opened
7/3/2012	10:59:58 PM	Bubbler valve opened
7/3/2012	10:59:58 PM	Helium MFC set to  0.000000
7/3/2012	10:59:58 PM	H2 MFC set to  430.000000
7/3/2012	10:59:58 PM	BCl3 MFC set to  0.000000
7/3/2012	10:59:58 PM	PH3 MFC set to  20.000000
7/3/2012	10:59:58 PM	SiCl4 MFC set to  50.000000
7/3/2012	10:59:58 PM	Bypass solenoid MFC set to  0.000000
7/3/2012	10:59:59 PM	Tube furnace set to 1000
7/3/2012	11:27:59 PM	Helium valve closed
7/3/2012	11:27:59 PM	BCl3 valve closed
7/3/2012	11:27:59 PM	PH3 valve closed
7/3/2012	11:27:59 PM	SiCl4 pre valve closed
7/3/2012	11:27:59 PM	SiCl4 post valve closed
7/3/2012	11:27:59 PM	Main Vac valve closed
7/3/2012	11:27:59 PM	Bypass valve closed
7/3/2012	11:27:59 PM	H2 valve opened
7/3/2012	11:27:59 PM	Bubbler valve opened
7/3/2012	11:27:59 PM	Helium MFC set to  0.000000
7/3/2012	11:27:59 PM	H2 MFC set to  500.000000
7/3/2012	11:27:59 PM	BCl3 MFC set to  0.000000
7/3/2012	11:27:59 PM	PH3 MFC set to  0.000000
7/3/2012	11:27:59 PM	SiCl4 MFC set to  0.000000
7/3/2012	11:27:59 PM	Bypass solenoid MFC set to  0.000000
7/3/2012	11:27:59 PM	Tube furnace set to 750
7/3/2012	11:42:59 PM	H2 valve closed
7/3/2012	11:42:59 PM	BCl3 valve closed
7/3/2012	11:42:59 PM	PH3 valve closed
7/3/2012	11:42:59 PM	SiCl4 pre valve closed
7/3/2012	11:42:59 PM	SiCl4 post valve closed
7/3/2012	11:42:59 PM	Main Vac valve closed
7/3/2012	11:42:59 PM	Bypass valve closed
7/3/2012	11:42:59 PM	Helium valve opened
7/3/2012	11:42:59 PM	Bubbler valve opened
7/3/2012	11:42:59 PM	Helium MFC set to  500.000000
7/3/2012	11:42:59 PM	H2 MFC set to  0.000000
7/3/2012	11:42:59 PM	BCl3 MFC set to  0.000000
7/3/2012	11:42:59 PM	PH3 MFC set to  0.000000
7/3/2012	11:42:59 PM	SiCl4 MFC set to  0.000000
7/3/2012	11:42:59 PM	Bypass solenoid MFC set to  0.000000
7/3/2012	11:42:59 PM	Tube furnace set to 0
